>Hi all, >I wonder if there is any kind of photoresist (or any kind of chemical >that can be spinned and cured) >that can be etched by XeF2 ? >Has anybody observed any other material reacting with XeF2 other than >Si, Poly, some Si3N4's and a few well known metals ? >Thanks.. I'm not sure, but you may want to try a new UV cure epoxy available from Epoxy Technologies. Justin. Justin D. Mansell | "If your opponent strikes with fire, Ginzton Laboratory | counter with water." Stanford, CA 94305 | "To injure an opponent is to injure tel: 650-725-2266 | yourself." fax: 650-723-2666 | -Morihei Ueshiba http://www.stanford.edu/~jmansell|