durusmail: mems-talk: aligning the small samples on MA6 aligner
aligning the small samples on MA6 aligner
2008-02-07
aligning the small samples on MA6 aligner
alim polat
2008-02-07
Aligning small samples under MA/BA 6 Mask and Bond Aligner is very
difficult to achieve. For example, I have a exposure mask that has
only one layer and not very complicated. It is very hard to expose the
exact part of the mask to the small sample. Could anyone give me some
good ideas?
Alim Polat
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