Hello, I have just inherited a Cobilt mask aligner (rebuilt and renamed by Quintel Corp). Its a simple manual load machine for 4 " wafers. I understand from a number of process people I have toured thru our facility that this machine is a bit of a classic (ie everybody had one at one time and lots of product was pushed thru these tools). I also understand that alot of people modified the basic design to improve its performance. What I am looking for is some of this knowledge (lore). The machine will be in a university lab, so thru put is not an issue, but I need good resolution (1 um or better) and good overlay. I understand the machine presently has good resolution, but overlay is a problem (the chuck shifts when the wafer is put into contact with the mask. So, if anyone has any comments on maintaining this machine, how to improve the machine, or any other comments, would you please e-mail me. Any stories or hints would be greatly appreciated. Thank you Ken Westra westra@amc.ab.ca (403) 492 5570 ext 234 fax: (403) 492 1643