durusmail: mems-talk: Anneal recipe for Pt thin film on Si wafer
Anneal recipe for Pt thin film on Si wafer
2008-03-03
2008-03-05
Anneal recipe for Pt thin film on Si wafer
Miyakawa, Natsuki
2008-02-28
Dear all,

does anyone of you know a good anneal recipe for Pt thin film e-beam
evaporated (~300nm) or sputtered (~1µm) on Si wafer (with ~100nm thermal
oxide) in order to enhence the adhesion and to stabilize the electric
resistance? I don't use adhesion layer like Ti.
Thanks!

Natsuki

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