durusmail: mems-talk: IR absorber layer on thermopile
IR absorber layer on thermopile
1998-08-21
1998-09-11
IR absorber layer on thermopile
mabin
1998-08-21
Dear colleagues:
I want to construct broad-band infrared radiation absorber layer on the
top of silicon-based thermopile. This absorber must have a high
absorbance, a low heat capacity and a high heat conductivity. In
addition, it should be patterned to get proper shape and dimension. It
has been reported that gold black, silver black, aluminum black can be
used for this purpose but I wonder whether they can adhere strongly to
the passivation layer above the thermocouple and be patterned. Is there
any one who can tell me how to make such an absorber layer on
thermopile? Any construction method or reference advice will be highly
appreciated.

--
Ma Bin
500, Chi Feng Road
Shanghai Institute of Technical Physics
The Chinese Academy of Sciences
Shanghai 200083
P.R.C.

Email: mabin@online.sh.cn


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