durusmail: mems-talk: Edge Bead Removal
Edge Bead Removal
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Edge Bead Removal
basar bolukbas
2008-03-11
Dear bibbotson.

You can remove your edge beats with a q-tip which dipped into acetone.
But be careful when you clean your samples edge with this q-tip in order to keep
your patterns.

As far as i know, edge beats are very important to reach min. feature size that
you desire during expose.
So you have to remove these beats.

Bye...

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