Dear all,

Does anybody know how polymer etches  (isotropic or anisotropic) in:

1.
        Oxygen-based RIE
2.
        KOH (potassium hydroxide)

Any details are appreciated.

Regards,

Miss Ghazal Hakemi
PhD Student
Microsystems and Nanotechnology Centre (Building 70)
Cranfield University
MK43 0AL
tel. 01234 750111 x2583
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