durusmail: mems-talk: Prooerties of AZ9200 thick photoresist
Prooerties of AZ9200 thick photoresist
2008-03-13
Prooerties of AZ9200 thick photoresist
DEBASHIS MAJI
2008-03-13
Hi all,
    I am using an AZ9260 positive photoresist coating over a permalloy core
as an insulating material. My sensor is subjected to a temperature variation
of about -20 deg C to + 70 deg C . Can anybody provide me with the following
properties of AZ9260 for better
thermal analysis of my sensor:
          1) Elastic Constant E (MPa),
          2) Density (kg/um3),
          3) TCE (thermal coefficient of expansion )(1/k) ,
          4) Thermal conductivity(pW/um.K) and
          5) Electrical Conductivity(pS/um) .

   Thanking you,
   Debashis Maji.
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