Can anybody suggest any method to dissolve cool grease effectively?

Note: Cool grease is recommended thermal conducting epoxy to be used
for supporting wafer in DRIE.

Does anybody know about any other alternative?  I tried supporting with
photo resist, but it is not as effective as cool grease in carrying the
heat away from wafer, any good thermal conducting photo resist is
available for the same purpose?

Main problem with cool grease is, it can not be removed neatly (at
least I am not able to remove it neatly, I am using IPA+ benzene to
remove cool grease after process)

Ashwini