durusmail: mems-talk: wire bonding to chromium pads
wire bonding to chromium pads
2008-03-14
2008-03-17
wire bonding to chromium pads
prabhu arumugam
2008-03-14
hello all,

i want to wire bond to chromium pads (ebeam
evaporated, 200 nm thick,1 mm x 1mm). The chromium was
exposed to BOE during the fabrication process. I would
like to know the wire material, process conditions and
equipment details.

Any help is appreciated.

Thanks
prabhu
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