Hi all, I am putting Ti/Au metal lines on top of 1um PECVD oxide at ~380C. I found there is finite reisstance between the metal lines. Those are parallel lines with 100um wide and 2mm long. They are seperated at a distance of 40um. I am curious the reason behind it. I tried to measure the resistivity of PECVD oxide. It shows > 10E14 Ohm cm. Thank you. -- HY