Good Morning Everyone!

It's morning now in SoutKorea.
I'm doing a project which using a LIGA process.
But, I have a problem to make a good adhesion between  the Si
wafer(3000A Ti layer on) and the thick PMMA sheet.
Does anybody know how to make a 100um PMMA using a spin coating
technique?
or make a strong adhesion between the PMMA sheet and the wafer??

Thanks!