Hi, MEMS guys: We want to deposit 3um PZT film upon Pt/Ti/SiO2/Si using sol-gel. Anyone knows vendors of materials of precursor solution, commercial PZT micro-sized or nano-sized powder? Review paper recommendation is also welcome. Many thanks for your kindly suggestion. Regards. Teng Ma --------- Graduate Student School of Electromechanical Engineering University of Electronic Science and Technology of China North Jianshe Road, Chengdu, P.R.China Mobile: +86-13730668144 Office: +8602883205198