durusmail: mems-talk: The cost of some clean room stuffs
The cost of some clean room stuffs
1998-08-31
The cost of some clean room stuffs
Xiaoning Jiang
1998-08-31
Hi, MEMSers,

Is there anybody can give me some general idea of what cost
will be for the following items? (or get the manufacturer
info that we can contact):

1. (I) 300 sqare feet clean room (class 10,000) and (II) 900 sq. ft same room
2. a wet bench (sink, hood, and DI rinser, and others)
3. a 8-10" spin coater for 4" wafer (up to 6-7000 rpm)

Thanks in advance!

Sincerely

Xiaoning Jiang


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