Try ion milling instead of wet etching.=20
Or while using iodine based etchant try continuously stirring it and
frequently washing it with DI water.


-----Original Message-----
From: Erkin  Seker [mailto:erkin@virginia.edu]
Sent: Thu 4/10/2008 10:58 PM
To: General MEMS discussion
Subject: Re: [mems-talk] Au peeling away from Cr adhesion layer

Also, Cr/Au combination doesn't like iodine-based etch.
Try lift-off if applicable, or replace Cr with Ti.