I'm looking for a general reference which goes through some of the
experimental results from plasma / RIE machines.  I need information like
etch rates for various recipes, selectivites, etc.  Can anyone recommend a
reference book covering this material?
                                        Thanks,
                                                        Justin.


--
Justin D. Mansell       |
129D Escondido Village  |    "Only a risk tests the reality of a belief."
Stanford, CA 94305      |               -C. S. Lewis
(650)497-9236           |