Hi, I have two paper and a patent on etching vertical PET (2003). Have you seen that? Thanks, -Teimour -----Original Message----- From: mems-talk-bounces@memsnet.org [mailto:mems-talk-bounces@memsnet.org] On Behalf Of Thomas Reddy Sent: Saturday, April 19, 2008 1:36 AM To: mems-talk@memsnet.org Subject: [mems-talk] PET Hello I wanna to do a vertical etch on PET but every time i tried a lot of crack considered. what should i do? thanks