durusmail: mems-talk: what is best etcher for TiO2 Anatase
what is best etcher for TiO2 Anatase
2008-04-25
what is best etcher for TiO2 Anatase
Ahmet Varilci
2008-04-25
Hi

I would like to learn what  the best solution is for TiO2 anatase etch.
I want to etch the 1 micron holes on TiO2.
does the pirahna work for that process?

thanks

Ahmet
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