You will have to remove the edge bead manually. Increasing spin time will help with thickness uniformity I believer the resist should be pre-baked between consecutive spinning cycles to "add on" to thickness. I'm not so sure about that - check manufacturer's data sheet. Elina Kasman Process Development Engineer, R&D Engis Corporation Phone: 1(847) 484-7225 E-mail: ekasman@engis.com -----Original Message----- From: vaibhav mathur [mailto:kingvaibhav@hotmail.com] Sent: Tuesday, April 22, 2008 5:51 PM To: mems-talk@memsnet.org Subject: [mems-talk] SU-8 2 hi all, I use microchem SU-8 2. At 2000 rpm I achieve 2micron thickness. Now I want to increase the height to 5-6 microns. how do i do this?? 1) when I spin coat at 1000 rpm I get about 5 microns, the height is inconsistent though, and i get very bad edge bead. can someone suggest how to do this properly 2) also, if I do double spin coating, I should get 4 microns, right? but I get only about 2.4 microns, an increase of just 20 percent, I dont understand. Does someone have a recipe for double spin coating of SU-8?