Hi Moshe, What material are you trying to get to adhere to the Si surface, and what is the application? Au is suitable for some applications because it provides a clean, oxide-free surface that can improve chemical adhesion with some materials. Michael > ---------- Forwarded message ---------- > From: Moshe> To: mems-talk@memsnet.org > Date: Wed, 30 Apr 2008 22:14:14 -0700 (PDT) > Subject: [mems-talk] Gold evaporation coating on silicon. > Hello > > I want to coat silicon with evaporation coating, and > to assurance that the adhesion between the two > materials will be optimal. > What will be the optimal treatment to achieve > adhesion ?