Hello Nagare, There is no specific process to make the PMMA "more resistant" for = etching. If you are using it as an etch mask you have to be sure your = PMMA is thick enough and doesn't get washed away during the etch process = (and make sure you hard bake it beforehand). The optimization for this = process depends on your specific case. How big are the features you need = to etch? Which is their aspect ratio? You basically have to consider = that nonometer scale features require high resolution (thus a thinner = resist layer, << 400nm), whereas micron scale feature can be patterned = on thicker resist (> 500nm). The trade off you are going to face here is = that a thicker resist layer offers more resistance to the etching, = although is unpractical if you need high resolution.=20 Also, when dealing with etching it could be useful to switch to ZEP, as = it has a much improved resistance to etching (although potentially lower = resolution and a bit more difficult processing). Regards, R. -----Messaggio originale----- Da: mems-talk-bounces@memsnet.org per conto di Nagare Gajanan Nagare Inviato: dom 04/05/2008 20.24 A: mems-talk@memsnet.org Oggetto: [mems-talk] PMMA as a mask for RIE-SixNx =20 What should be the tretament for PMMA to use it as a mask for RIE of = SixNx with CHF3 and CF4 gass. Nagare Gajanan D