durusmail: mems-talk: SU-8 structure using wet etching
SU-8 structure using wet etching
2008-05-06
2008-05-06
2008-05-07
SU-8 structure using wet etching
Prem Pal
2008-05-07
Hi Michael

Thank you for your suggestions and providing references. If you have the SEM
other than published in your papers, please send.Do you have any experinece of
SU-8 peeling off if the KOH etching is performed at temperature lower than 60 C.

Best regards

Prem
reply