durusmail: mems-talk: Dep of Piezoelectric Films...
Dep of Piezoelectric Films...
Dep of Piezoelectric Films...
Padmanabhan Aravind
1998-09-04
I am looking for information on vendors (companies or universities) for
putting down PZT and or AlN. I would prefer MOCVD/sputtering techniques but
other methods like sol-gel or screen printing are also acceptable.

Any information or comments would be highly appreciated. Thanks in advance.

 --Aravind

Aravind Padmanabhan
Honeywell Technology Center
ph: 612-954-2970
email:padmanabhan_aravind@htc.honeywell.com


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