Hi all

For one of my projects, I need to create some deep holes in a Quartz wafer.
I wonder if anybody has experience with etching quartz wafer for >100um
depth? Thanks a lot.

Best
Leo

--
Xiaoguang "Leo" Liu
Birck Nanotechnology Center,
Purdue University,
1205 W.State Street, West Lafayette, IN, 47906 USA
liu79@purdue.edu