durusmail: mems-talk: MEMS dicing issue
MEMS dicing issue
2008-06-17
MEMS dicing issue
Terry Zhu
2008-06-17
I am looking for a UV sensitive double side tape for dicing. The tape
has to be attached to a glass wafer before attaching to the MEMS wafer.
SO UV light will be going through a glass wafer to reach the tape. Any
one can recommend a tape and/or a supplier? I tried a single side tape
but had problem peeling it out without damaging the moving part. Thanks.

Terry


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