durusmail: mems-talk: protocol for octadecyltrichlorosilane (OTS)
protocol for octadecyltrichlorosilane (OTS)
2008-06-20
protocol for octadecyltrichlorosilane (OTS)
Barbara Cortese
2008-06-20
Hi all

I'm trying to sylanize Su8 with octadecyltrichlorosilane (OTS), but I'm finding
some problems like a powdery residual, or PDMS attachment.
Does anyone know a protocol to use OTS? If so can you please share it?

Thanks
Barbara

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