Hi Lin,

I am using SU-8 2050. I had similar problem before. I think the wrinkles and
roughness may be due to contaminated substrate.
I solved the problem by carefully cleaning the substrate using Piranha wet
etch and dehydrating the substrate at 120C for 10 min.

Good luck!

Meifang


-----Original Message-----
From: mems-talk-bounces@memsnet.org [mailto:mems-talk-bounces@memsnet.org]
On Behalf Of Li, Lin (MU-Student)
Sent: Thursday, 3 July 2008 3:00 AM
To: mems-talk@memsnet.org
Subject: [mems-talk] SU8-2075

I have been using SU8-2075 to make 100um thick structure. But I have
difficulty in reducing the wrinkles and the roughness.
I tried 65C and 95C softbaking 5min and 10min each or even tried to cool
down and bake repetively as the manual suggested.
Could you let me know any recipe or methods to solve this problem?

Best Wishes,

Lin Li