The standard process for silicon nitride is PECVD. You'd definitely also use reactive sputtering. I do not think E-beam will work well. Gord Wang Nanowave -----Original Message----- From: Dave [mailto:dmc642@gmail.com] Sent: July 16, 2008 12:10 PM To: mems-talk@memsnet.org Subject: [mems-talk] Ebeam evaporation of Silicon Nitride Hello, I am looking to deposit an insulating, optically clear, layer for some circuitry, and was wondering if I could Ebeam evaporate Silicon nitride? Also, if I can, I saw something about alpha and beta forms, is there any substantial difference when dealing with the insulating properties? Thanks, David Casale Drexel University