>Dear MEMS community, > Has any one used metal on SU-8 photoresist. We are having problems metal sticking to SU-8. >I would appreciate any inforamtion on it is passed on. >Regards, >Padmaja >Padmaja Ramadas (972)-927-1108 (w) >Texas Instruments Incorporated (972)-995-7785(fax) >P.O. Box 655012 ramadas@ti.com >M/S 945 >Dallas, Texas 75265 > > > Dear Sir How do you make the deposition and what kind of metal? I have already observed this problem with gold (thermal evaporated) Best regards __________________________________________________________________ Dr H. Lorenz Swiss Federal Institute of Technology (EPFL) Institut for Microsystems IN ECUBLENS CH-1015 Lausanne, Switzerland E-mail: hubert.lorenz@epfl.ch Phone: +41(21)693 58 51 Fax: +41(21)693 66 70 ************************************************************************** * Visit the SU-8 web page * * URL: http://dmtwww.epfl.ch/ims/micsys/subtopics/projects/su8/EPON.html * **************************************************************************