durusmail: mems-talk: Wet etch for GST
Wet etch for GST
2008-08-07
Wet etch for GST
prashanth busa
2008-08-07
Group,

I am looking for a wet etch solution or staining technique to etch
GeSbTe-225 (phase change material) to distinguish amorphous/crystalline
regions using a SEM. I couldn't find any literature that shows the grain
structure of GST using a SEM and not TEM.

Appreciate your help.

Thanks,
Prashanth
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