durusmail: mems-talk: IR-pyrometer for surface temperature measurement
IR-pyrometer for surface temperature measurement
IR-pyrometer for surface temperature measurement
Miyakawa, Natsuki
2008-08-07
Dear all,

I want to measure the surface temperature of my sensor chip (Pt-metallization on
SiO2/Si-substrate, about 2x1cm large, 300µm thick) using IR-pyrometer
(preferable wavelength range is 8-14µm for low cost) during temperature cycles
(T-range is about 50-1000°C).
In order to measure the surface temperature independent of the sample emissivity
(which depends strongly on the materials, temperature, wavelength etc) I'm
considering about coating the chip surface with a matt black layer (like carbon
black or baking enamel) with high and nearly constant emissivity.

Has anybody of you ever tried something like that? Can you recommend me
appropriate coating materials, or some other better way to measure the surface
temperature of a small sample?

Measuring with small Pt100 or thin thermocouple don't work reliably due to too
large heat loss and too bad heat contact.


Thank you!

Best regards

Natsuki
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