durusmail: mems-talk: Wet etching thickness technique with smooth surface
Wet etching thickness technique with smooth surface
2008-08-16
2008-08-19
Wet etching thickness technique with smooth surface
Moshe
2008-08-16
Hello
When I operate wet etch to thick silicon wafer I get like scratches on the
surface.
I am locking for technique to get smooth surface on silicon wafer when I operate
wet etch.
The wafer is without any mask.
Thank You



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