durusmail: mems-talk: Thinning silicon wafer <100> by wet etching
Thinning silicon wafer <100> by wet etching
2008-08-22
2008-08-23
2008-08-23
Thinning silicon wafer <100> by wet etching
2008-08-25
Thinning silicon wafer <100> by wet etching
Moshe
2008-08-22
> Hello
> When I operate wet etch to thin silicon wafer I get like
> scratches on the surface.
> I am locking for technique to get smooth surface on the silicon
> wafer when I operate thinning by wet etch .
> The wafer is without any mask.
> Thank You



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