durusmail: mems-talk: Proximity bake.
Proximity bake.
1998-09-15
Proximity bake.
Luis Otavio
1998-09-15
Dear Researchers

I´d like to know the following details about the proximity bake process:

1) A description of the process: the distance between the substrate and the
hot-plate; the kind of support for the substrate (is it like a mesh? or like
a flat plate? is it metallic?).

2) An explanation on why is it better than the contact bake on some cases.

Thanks

Luiz Ferreira
National Synchrotron Laboratory
Cx. P. 6192
13083-970 Campinas - SP - BRAZIL
+55 19 287-4520 voice
+55 19 287-5211 fax


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