Dear Colleagues,

I was wondering if it is possible to etch Lithium Tantalate (LiTaO3) in
a standard DRIE setup with SF6/C4F8. Essentially, I am looking to etch a
series of circular or square holes (2-3 micron diameter or side length)
through a 500 micron LiTaO3 wafer. Thank you very much in advance.

Regards,
Prashant Padmanabhan