Under what conditions is buffered-HF (BOE) etching
diffusion limited?
Koray Karakaya
2008-09-15
Hi Ken,
If surfactants don't solve your problem try increasing BOE bath temperature
(~60 C)
Koray
On Mon, Sep 15, 2008 at 6:48 PM, Shay Kaplan wrote:
> Are you using BOE with surfactant?
>
> Shay
>