You might consider using a diffusion barrier layer between the nitride and Au. Also, watch out for eutectic alloys with your adhesion layer. -Michael >>> "abhaya joshi"9/18/2008 10:20 PM >>> Hi all i am having gold layer of 1.5 um on Si3N4 coated Si wafer. i would like to treat this wafer at 650C. what will be the effect on gold. in my previous experiment, the when i coated the gold on silicon and treated for 600C., i observed the re-flow of gold. can any one tell me the cause for this?