Yes, you can do a standard KOH orientation-dependent etch. Antimony (Sb) is an n-type dopant (like P and As) and will not slow the silicon etch rate, as p-type dopants (like B) will. --Kirt Williams ----- Original Message ----- From: "Kuijpers, P e m"To: Sent: Friday, September 19, 2008 1:59 AM Subject: [mems-talk] KOH etch on Si Hi all, Can we perform standard KOH etch on highly Sb doped Si wafers? So we will get the same etch angle of 54.7°? Thanks Peter Kuijpers