durusmail: mems-talk: how to test porosity of deposited layer ?
how to test porosity of deposited layer ?
2008-09-20
2008-09-21
how to test porosity of deposited layer ?
kamlesh_engg@iitb.ac.in
2008-09-20
hi

i have deposited SiO2 by PECVD. Now i want to test the quality of the film
more specifically i want to check the porosity of the deposited film
please tell me how i can test porosity.

--
Kamlesh Pawar
M.Tech (Biomedical Engg)
Mob :+919870062960
IIT-Bombay

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