Hi, I am working with the Intellisuite MEMS CAD tool. So far I've designed a tunable device incorporated with comb drive actuators. For the performance analysis i used the Thermo Electro Mechanical module. Now I have to study the Transient characteristics of the device. For that I performed the Transient Dynamic Analysis. For an accurate result I have to mention both the Mass Damping and Stiffness Damping. The problem is, I dont know how to calculate the Stiffness damping and mass damping. If someone could help me to solve this problem and I would be grateful to them. Thank you Renil.