Before changing the process I would consider these ideas. 1. Are your glass wafers manufacturered properly and were properly annealed so they don't have internal stress? 2. Do you have uneven heating? Fracturing would be driven by a temperature differential across the wafer, not the rate of temperature rise or temperature itself. Rapid temperature changes are associated with fractures of ceramic objects, but this is because rapid heating is often uneven heating, but it isn't directly the cause of fracture. Providing thermal contact that will more evenly heat the wafers might well fix your breakage problem. Ed -----Original Message----- From: mems-talk-bounces@memsnet.org [mailto:mems-talk-bounces@memsnet.org] On Behalf Of Don Friedrich Sent: Wednesday, October 01, 2008 12:15 PM To: mems-talk@memsnet.org Subject: [mems-talk] OmniCoat baking question I am seeking a baking process for OmniCoat which is lower T and slower ramp than recommended by MicroChem. The recommended procedure of 200C for 1 minute breaks my glass wafers. I would appreciate knowing how others have baked OmniCoat at lower temperatures, such as 120C. Thank you. Don Friedrich JDSU - Advanced Optical Technologies