Sapphire is very tough to etch while you can etch aluminum in Phosphoric acid or base like KOH or NaOH Shay -----Original Message----- From: mems-talk-bounces@memsnet.org [mailto:mems-talk-bounces@memsnet.org] On Behalf Of Berg, Jordan Sent: Wednesday, October 08, 2008 8:48 PM To: mems-talk@memsnet.org Subject: [mems-talk] PAN etch selectivity over sapphire Does anyone know if a standard aluminum PAN etch (phosphoric acid-acetic acid-nitric acid) will etch or damage a sapphire wafer? We are trying to remove a 60 nm-thick aluminum film from a sapphire wafer. Thanks! Jordan