durusmail: mems-talk: Plasma etch of GaN?
Plasma etch of GaN?
2008-10-08
2008-10-09
Plasma etch of GaN?
Kasman, Elina
2008-10-08
Is anyone here doing dry etching for gallium nitride? Or any other
processing with this material? I'd be grateful to discuss that with you!

Thanks

Elina Kasman

Process Development Engineer, R&D
Engis Corporation
Phone: 1(847) 484-7225
E-mail: ekasman@engis.com

reply