Hi, you can look for this paper, It may help you: Jaibir Sharma and Amitava DasGupta, "low temperature wet release process for low stiffness structures" Journal of Micro/ Nanolithography MEMS& MOEMS,Vol. 7, No.4, Oct–Dec 2008 issue. bye jaibir with regrads Jaibir Sharma Reasearch Scholar(PhD) Electrical Department, IIT Madras, Chennai - 36 INDIA Phone:044-22575444(off) 09445311513(home)