Dear all, Can anyone suggest a front side protective material such as those used in SOI-MUMPs. Basically I want to make a suspension structure on the device layer of a SOI die and cut off the silicon at the handle layer. I wish to find a suitable polymer coating to protect the DRIE etched structures on the front side, so that backside DRIE etching and sio2 wet etching will not attack front side structures. Thank you very much and I'd be grateful to discuss that with you! Jingyan