Matthew- The following paper should address your need: Rabinovich, et al, "The effect of release-etch holes on the electromechanical behavior of MEMS structures" Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 http://ieeexplore.ieee.org/xpl/freeabs_all.jsp?tp=&arnumber=635400&isnumber=1378 7 Raj Gupta, PhD Volant Technologies +1.415.391.0426 http://terahz.org ----- Original Message ---- From: matthew kingTo: mems-talk@memsnet.org Sent: Friday, October 31, 2008 4:31:27 AM Subject: [mems-talk] capacitance calculation of perforated rotating plate Hi all, Is there any method to get the capacitance of perforated rotating plate other than FEM or BEM? Any kings of help is appreciated. Thanks in advance. Matthew King