Good morning every one, i need to realize passing holes in (111)Germanium
wafers 0.4mm thick. Realization of the hole should not induce any kind of
lattice damage, so i can not use mechanical operations.
For my understanding it does not exists any wet etch for germanium, so I
would use some dry etch, or bosch process, or plasma etch or similar.
Do you know someone who could provide this kind of service ?

Best regards,
Andrea