Phosphorus pentoxide has the smell of garlic. Best Regards, Garrett Oakes EV Group invent * innovate * implement Regional Sales Manager North America - Direct: +1 (480) 305 2443, Main: +1 (480) 305 2400 Fax: +1 (480) 305 2401 Cell: +1 (480) 516 6724 E-Mail: G.Oakes@EVGroup.com, Web: www.EVGroup.com -----Original Message----- From: Nicolas Duarte [mailto:nbd110@psu.edu] Sent: Friday, November 07, 2008 5:47 AM To: General MEMS discussion Subject: [mems-talk] Smelly Wafers I just started a new job where, after an HF etch to remove phosphor glass, the wafers have a pungent garlic smell to them. I asked my coworkers about this and they said it was "normal," but I have never encountered a wafer that had a scent. It has been my experience that where there is smell there is a contaminant so I was wondering if anyone know what the potential source of this smell may be. Nicolas Duarte