Does anyone have any knowledge of other etch stop layers for silicon DRIE, besides SiO2 and Al? We have an Adixen system and for my process it would save extra work to have something else as etch stop layer (not Al or SiO2). Sebastian Sosin Address: Delft University of Technology, Mekelweg 4, Room LB 01.380 2628 CD DELFT, the Netherlands Office Phone # : +31(0)152789421