Hi,

sputtering tungsten is surely the choice. If you can adjust stress you even can
leave the adhesion layer and get working results.

Regards,

lumina


-----Ursprüngliche Nachricht-----
Von: mems-talk-bounces@memsnet.org [mailto:mems-talk-bounces@memsnet.org] Im
Auftrag von Pothisorn, Araya - potay006
Gesendet: Freitag, 10. Oktober 2008 05:42
An: mems-talk@memsnet.org
Betreff: [mems-talk] How to deposit Tungsten blanket on Oxide layer

Hi all,

I'm new in MEMS. Does anyone have experience in deposit tungsten on
Oxide layer? I need to deposit 1000 angstorm of tungsten blanket on the
oxide layer.

Regards,

Araya